SUBLIMATION OF SOLID METALORGANIC PRECURSORS

CVD processes draw their products from precursors that are dosed into the reactor chamber in the gas phase. The availability of elements drawn from solid metalorganic precursors substantially extends the range of options in:
• Hard and wear-resistant coatings
• Low-friction coatings
• Barrier layers

Traditionally, gaseous or evaporated liquid precursors are used in CVD. Use of metalorganic precursors requires the direct sublimation of the material before it can be dosed into the process. The Bernex™ MOCVD Evaporator is a self-contained module designed for the sublimation and transportation of solid metalorganic precursors into the coating process chamber. The vapors generated by the Bernex™ MOCVD Evaporator can be used for the synthesis of CVD thin films composed of numerous functional materials, such as pure metals, nitrides and carbonitrides, and oxides.