CVD LABTUBE, THE MASTER R&D TOOL

Dedicated to R&D work or small concept proof validation trials, Bernex CVD LabTube is equipped with a variety of CVD precursor modules.

BERNEX EQUIPMENT

CVD LABTUBE, THE MASTEr R&D TOOL

Dedicated to R&D work or small concept proof validation trials, Bernex CVD LabTube is equipped with a variety of CVD precursormodules. Its modularity supports and enhances the production and extension of the coating portfolio, allowing engineers to create diff erent combinations of coating materials, new materials or interfaces. The safe design and modularity of the system allows the users to meet the needs of present and future challenges by tuning coating properties such as adhesion, crystal structure or morphology. The small size of the Bernex CVD LabTube unit, along with its low consumables, contributes to high costs savings during coating development.

Read more about our machines

Available modules 

  • AlCl3 generator 
  • HTC (High Temperature Chlorinator for MeClx generation, like ZrCl4 or HfCl4)
  • NH3 module
  • BCl3 module
  • Up to four liquid modules with dedicated controlled evaporators, using carrier/purging gas supply
  • Internal chlorinator module (> 900°C)
  • Solid precursor sublimator
  • Possibility to combine with the Bernex MOCVD 
  • (Metal-Organic CVD) Evaporator 
  • Tailored options are available on demand

Designed with the
user in mind

Versatile and
flexible

Turn-key
operation